Exhaust gas processing system

ABSTRACT

In a pre-process, a particle shape substance is decomposed and removed using a cyclone and an electric dust collection apparatus, NOx in an exhaust gas is decomposed completely using discharge, to establish technique for generating NO 2  for necessary to oxidize a particle shape substance in a real time. The generated NO 2  and ozone and active oxygen generated the particle shape substance is decomposed completely. NO 2  for necessary to the particle shape substance is generated and is processed in response to operation condition of an engine.

BACKGROUND OF THE INVENTION

[0001] 1. Technical Field

[0002] The present invention relates to a n exhaust gas processingsystem and an exhaust gas processing apparatus in which a composition ofa harmful chemical substance of an exhaust gas etc. which is exhaustedfrom a boiler including NOx, a particle shape substance and hydrocarbonand an engine etc. and a chemical reaction etc. of a harmful substanceare promoted and a chemical work and an environment machine andapparatus.

[0003] 2. Prior Art

[0004] Up to now, a processing technique having a low cost and high forprocessing NOx in an exhaust gas and fine particles in a harmfulsubstance has not established in world. As a removal technique for NOx,a dintoration technique using an ammonium is established as a fixedmachine of a boiler and an engine but this technique has not employed ina moving machine such as an automobile from an aspect of the safety.

[0005] To NOx removal for a diesel vehicle it take a counter-measurementwith a high pressure injection of the engine and a figuration of acombustion chamber but with only this counter measurement a satisfiedtechnique has not established. There is a device in which as to NOx inthe exhaust gas using a noble metal catalyst such as a platinum andparadigm etc. NOx generates and using a catalyst in a post-process thefine particles are decomposed but NOx reduction effect is low about 15%and a regular processing apparatus has not established. Further, thereis a three-way catalyst in which the noble metal is contained mainly butthis is high cost and is not to be practical use. In this, since theplatinum used in the catalyst lowers the catalyst function due to thesulfur in the fuel, a spread of a low sulfur fuel sets as premise.

[0006] On the other hand, as the removal technique for the particleshape substance a technique in which as the above stated oxidationdecomposition using NOx the noble metal such as platinum is lowtemperature decomposed has established but this is high cost the regularspread has not attained. Now, a method for processing, in which using aceramic filter the fine particles are adsorbed and after the adsorptionthis is processed in the combustion, has lo established. However, abatch processing and an alternative processing system in a pluralprocessing system has established but since this invites the high costand the badness in use manner, the regular spread is obstructed.

[0007] In the diesel engine, according to the operation conditions, thecomponents in the harmful substances in the exhaust gas changed largely,the method in which all the present processing apparatuses is followedand processed and an apparatus in which the processing function loweringis regenerated in a real time are not realized.

[0008] It is established a technique wherein the generated NO₂ and theozone generated in an oxygen atmosphere and an active oxygen are used asan oxidation agent, the particle shape substance is composed completelyusing a low cost catalyst under a low temperature about 300 C. or notusing completely the catalyst.

[0009] It is established a technique wherein by following an operationcondition of the engine, a processing is carried out in a real time. Itis established a technique wherein a construction having a low cost anda durability performance is attained.

[0010] It is established an apparatus in which an ammonia generationmeans is accompanied independently and the processing of NOx etc. isfunctioned effectively.

[0011] It is established a technique about a generator system having ahigh heat resistance and a superior efficiency wherein when an exhaustgas is processed according to a discharge and an electric application,an additionally electric capacity is compensated and it has been acompatibility with an already established generator.

SUMMARY OF THE INVENTION

[0012] An object of the present invention is to provide an exhaust gasprocessing apparatus wherein in which the particle shape substances areseparated and removed and NOx in the exhaust gas is decomposed usingdischarge.

[0013] Another object of the present invention is to provide an exhaustgas processing apparatus wherein in which the particle shape substancesare processed with a real time by complying with the operation states ofan engine.

[0014] (1) As a solving measure for the technique wherein, without theaffect of sulfur, in a pre-process using the cyclone and the electricdust collection, the particle shape substance is separated and removed,using the discharge NOx in an exhaust gas is decomposed completely, andas to the particle shape substance which has not separated in thepre-process, and a necessary NO₂ for oxidizing the fine particles undera low temperature of about 300 C. is generated in a real time.

[0015] Firstly, as a means for carrying out without receipt of theaffect of sulfur in the fuel, the generation of NO₂ is carried out notusing the noble metals such as platinum as the catalyst. Namely, theparticle shape substance having the large particle diameter is separatedby the centrifugal force using the cyclone, and the particle shapesubstance having the small particle diameter is removed using theelectric dust collection. Next, NOx is decomposed using a barrierdischarge etc. and NO₂ necessary to decompose the particle shapesubstance is generated in NO in NOx.

[0016] As a concrete example, to lower the voltage applied to theelectrode as possible, one of the electrodes is formed by the anodeoxidation with a long line shape, a belt shape, a rod shape, or a plateshape, and an outer skin of a superior permeability performance and thininsulation body such as a ceramic, and a heat resistance silicone etc.is covered.

[0017] Another of the electrodes is formed with a bear wire suited to ashape of the insulation core wire and along to the insulation core wireis arranged closely in a parallel shape, a rectangular shape, a spiralshape, a net shape, or a zigzag shape by performing the anode oxidationfilm and the ceramics coating to obtain the anti -environmentperformance and then the ozone and the barrier discharge is generatedeffectively.

[0018] The alternating current high voltage is applied to the electrodesand the voltage and the frequency number are changed, in conform to theraise of the voltage, NO in an exhaust gas containing a residual oxygenis lowered and it has became zero when it is reached to same voltage.

[0019] On the other hand, NO₂ is increased gradually slightly (less than{fraction (1/10)}) at first in comparison with NO and NO₂ is existed ina range of zero and it is shown a peak value and when the voltage islowered further it is reduced gradually and becomes zero soon. At thistime point, NOx is gone out of existence completely.

[0020] In this case, the more an oxygen concentration and a hydrocarbonconcentration is high, the more a range for vanishing completely NO andNOx is existed wide. Namely, it is possible to make the energy of NOxdecomposition small and is carried out the stable processing. Bycontrolling the oxygen concentration and the hydrocarbon concentration,it is possible to obtain from a V curve to a reverse trapezoid curvehaving long bottom face.

[0021] In the exhaust gas processing system, when the above statedconcentrations are controlled, it is possible to carry out a furtherstable exhaust gas processing. Further, when the voltage is increasedfurther, in some voltage NO is increased from zero and NO₂ is shifted toincrease, it is possible to obtain an increase characteristic.

[0022] By applying this phenomenon, in the range of NO being zero, it ispossible to control in a moment of time a range from a peak value tozero according to a slight change of the voltage. By following theoperation of the engine and by suiting an amount of the particle shapesubstance, NO₂ necessary for converting to NO₂ is generated in a realtime. This control is carried out in a small area and a high area of thedischarge energy.

[0023] It is necessary to set a discharge element and a power supplymeans suited to the size of the engine and the operation condition and acapacity of the means necessary to the control. When the barrierdischarge in this example is used, in the discharge element of 30 cm, itis possible to process with a comparatively low voltage of 18 kHz, 6.5kv degree and a small consumption electric power of from 10 W to 20 W.

[0024] Further, in a case of the spiral shape discharge wire, it isresulted that a winding pitch of about 10 mm is obtained the mostsuperior decomposition efficiency.

[0025] (2) As a solving measure of the technique wherein the generatedNO₂ in the above stated item (1) and the ozone generated in an oxygenatmosphere and an active oxygen are used as an oxidation agent, theparticle shape substance is decomposed completely using a low costcatalyst under a low temperature about 300 C., since the amount of NO₂and the ozone (more than 400 C., this has became the active oxygen) iscontrolled freely with the volt age, the frequency number and the oxidesof vanadium and molybdenum, the zeolite and the alumina are used as thecatalyst and under the low temperature about 300 C., without of the bareuse of the noble metal the particle shape substance is decomposedcompletely.

[0026] Further, using the nitric acid which is formed by the generatedNO₂ and the water in the gas and the sulfur oxide such as sulfuric acidwhich is formed by the oxidation of sulfur in the fuel, without thecatalyst it is possible to decompose the particle shape substance and tocontrol the generation amount of NO₂.

[0027] (3) A solving measure of the technique wherein by following theoperation condition of the engine and it is carried out in the realtime, using NO₂ control technique stated on the above item (1), byfollowing to the operation condition of the engine, the necessary NO₂amount is calculated using the sensor and the operation characteristicor is generated immediately and then the particle shape substance isdecomposed completely.

[0028] A particle shape substance sensor is arranged in an inlet port ofthe processing apparatus, the particle shape substance is sensed in thereal time, and the information thereof is inputted to a controller.

[0029] On the other hand, in before and after of a flow passage of theprocessing apparatus, NOx sensor or NO₂ sensor is arranged, and it isgrasped that whether the concentration of after the pass-through of theprocessing apparatus has been in an increase condition or in a decreasecondition, NO₂ amount for necessary to the complete decomposition of theparticle shape substance is calculated according to NOx concentrationand NO concentration after the processing.

[0030] The voltage value suited to the necessary energy is determinedand the voltage is controlled in the real time, a s a result NOx and theparticle shape substance are removed completely.

[0031] (4) A solving measure for attaining the above stated items(1)-(3) with the low cost structure, in the exhaust gas processingsystem according to the present invention, three large material elementsin the cost aspect are existed and these three material elements havebeen the discharge element, the low temperature catalyst, and thecontrol means.

[0032] Firstly, as the discharge element, this element has been a simplestructure in which around the thin and long discharge core wire thedischarge wire is arranged with the spiral shape, for example. With thetechnique for manufacturing the optical fiber and the electric wire, thelarge amount discharge elements are manufactured simple and thedischarge element having the superior reliability is manufactured.

[0033] Next, as to the catalyst, as stated in the above stated item (2),in basically without the use of the noble metal wholly, it is realizedthe use of about a few amount of 0.2% in the weight percentage and tothe oxides of vanadium and molybdenum having the comparative low costsince the alumina and the zeolite are coexisted, compared with theconventional catalyst in which the noble metal is main, it is settledwith the very low cost.

[0034] As a power supply and a control unit, NO decomposition and NO₂generation are performed with a comparative low electric power andfurther the control is performed using a simple technique with thevoltage and the frequency.

BRIEF DESCRIPTION OF DRAWINGS

[0035]FIG. 1A is a cross-sectional explanatory view showing an exhaustgas processing apparatus in which in a pre-process the particle shapesubstance are caught and processed by the cyclone and the electric dustcollection according to the present invention and in a post-process NOxis decomposed using the high voltage discharge it enable to follow thedynamic change in the engine etc.

[0036]FIG. 1B is a cross-sectional explanatory view showing an exhaustgas processing apparatus according to the prior art in which in apre-process and a post-process the catalyst using the noble metals isused.

[0037]FIG. 2A is a cross-sectional explanatory view showing an exhaustgas processing apparatus in which in a pre-process the particle shapesubstance is caught and processed by the cyclone and the electric dustcollection according to the present invention and in a post-process NOxis decomposed using the high voltage discharge it enable to follow thedynamic change in the engine etc.

[0038]FIG. 2B is a cross-sectional explanatory view showing a dischargeportion in which in a pre-process the particle shape substance is caughtand processed by the cyclone and the electric dust collection accordingto the present invention and in a post-process NOx concentration iscontrolled and in the pre-process the caught particle shape substance isprocessed completely in a catalyst portion.

[0039]FIG. 3A is an explanatory view showing an example of the barrierdischarge unit according to the present invention.

[0040] PIG. 3B is an explanatory view showing an example of a spiralshape discharge disc plate of the barrier discharge unit according tothe present invention.

[0041]FIG. 4C is an explanatory view showing an example of a dischargerpartition disc plate of the barrier discharge unit is performed.

[0042]FIG. 4A is an explanatory view showing an example of the barrierdischarge unit according to the present invention.

[0043]FIG. 4B is an explanatory view showing an example of a laminatedinsulation portion of the insulation electrode portion of the barrierdischarge unit according to the present invention.

[0044]FIG. 4C is an explanatory view showing an example of a dischargedisc plate in which a thin film insulation of the barrier discharge unitis performed.

[0045]FIG. 5A is an explanatory view showing an example of the barrierdischarge unit according to the present invention.

[0046]FIG. 5B is an explanatory view showing an example of a laminatedlayer insulation portion of the insulation electrode portion of adischarger disc plate in which a thin film insulation is performed.

[0047]FIG. 6 is NOx (NO, NO₂) reduction characteristic explanatory viewof a spiral shape discharge portion.

DESCRIPTION OF THE INVENTION

[0048] Hereinafter, the examples of the carrying out embodimentsaccording to the present invention will be explained. FIG. 1A is anexhaust gas processing apparatus of one embodiment according to thepresent invention and FIG. 1B is an exhaust gas processing apparatus ofone embodiment according to the prior art.

[0049] The features of the present invention are classified largely totwo processing units, in a pre-process in a cyclone 6 the particle shapesubstance is caught and processed, in a post-process in NOxdecomposition unit 9 according to a barrier discharge NOx is decomposedand NO₂ necessary to decompose the amount of the residual particle shapesubstance in which NO in the exhaust gas have not processed in thepre-process is generated and NO₂ is made to form CO₂ using the catalystetc.

[0050] In the exhaust gas processing unit, the exhaust gas from anengine is processed in a bypass flow passage, which is separated from anexhaust gas main flow. Namely, the exhaust gas from the engine flowsinto through an exhaust pipe 2 and in an interference chamber 1 theexhaust gas is caught in a coupling pipe 3, which is connected with afluid state, and the exhaust gas is led into the cyclone 6 through apipe 5. As a motive force therefor a blower 9 is provided. Most of theexhaust gas which is led into the cyclone is swirled as shown in anarrow mark a and then the particle shape substance are caught in abottom portion 7 of the cyclone 6. At an upper portion of a separationchamber of the cyclone the particle shape substance is removed and abypass flow of the exhaust gas in which NOx is standardized is led intoNOx decomposition unit 8, in a barrier discharge electrode portion 10the decomposition and NO₂ generation are carried out. A referencenumeral 4 denotes an exhaust gas pipe, which is connected to a muffleretc. A high voltage power supply portion and a control portion areomitted.

[0051] Further, in a suitable portion between the inner portion of thecyclone 6 and NOx decomposition unit 8 a clothe shape filter or a spongeshape filter for catching the fine particle shape substance may beprovided, and using the filter as an electric dust collection portion 15the particle shape substance can be caught effectively with approximate100% rate.

[0052] The conventional exhaust processing apparatus shown in FIG. 1Bwill be explained. In the pre-process, the large amount platinum 25 a,paradigm 26 a and aluminum 27 a use and NO in NOx oxidizes NO₂ and inthe catalyst in the post-process the particle shape substance isoxidation-harmless. Since the noble metal is used, it invites the highcost and the spread obstructs greatly. In this catalyst system, againstto the operation of the engine etc., for example by following thegeneration conditions of the particle shape substance, it is impossibleto carry out the processing and it is impossible to take theconsideration to the affect and detorition of sulfur. The removal of NOis not carried out completely and NO of 85% is not discharged from anexhaust port. This can say the complement apparatus.

[0053] In the post-process, the metal is used mainly as the catalyst andplatinum 25 b, paradigm 26 b and aluminum 2 b use and the processing arecarried out. A reference numeral 21 a is a frame of the machine andapparatus, and a reference numeral 28 a is a partition wall having agood transparency for holding the catalyst.

[0054]FIG. 2A and FIG. 2B will be explained. FIG. 2A is the same to FIG.1A and the explanation thereof will be omitted. FIG. 2B shows an exampleof a system, NO in NOx in the caught particle shape substance 7 a isoxidized in a discharge electrode portion 10 a of NOx processing portion8 a and a necessary NO₂ is generated and supplied using the blower 9 a.Then the particle shape substance is made to form CO₂ and is returnedinto the exhaust gas.

[0055] The caught particle shape substance may be processed using thecatalyst and the heater. As to the catalyst, without the use of thenoble metals etc., ge-site of iron oxide and zeolite having thecomparative low cost can be used, and using calcium compound theparticle shape substance is burned and processed using the heater.Further the heater and the catalyst can be used together.

[0056] Since the particle shape substance is stored in the bottomportion of a vessel by the force of cyclone, the bottom portion of thevessel may be made by the high heat insulation performance material suchas ceramics and further by utilizing effectively the he at generatedduring the burning time the processing of the particle shape substancecan be carried out perfectly with a is real time.

[0057] The shape of the collection portion of the particle shapesubstance is made to form a guitar shape and it can have the heatinsulation effect. Further, according to the provision of a collectionbox arranged at a lower portion of the collection portion, the particleshape substance can be discharged in a suitable time and the easilyconstruction having the low cost processing apparatus can be attained.Before the gathering in the collection box using a screw compressionmachine the particle shape substance is caught and then the processingefficiency can be heightened. A reference numeral 15 a denotes theelectric dust collection portion.

[0058] Next, FIG. 3A to FIG. 3C will be explained. FIG. 3A is astructural view showing an example of a barrier discharger structureused for NOx decomposition and NO₂ generation. To an outer periphery ofan insulation electrode portion 13, which is covered by an insulationfilm such a thin anode oxidization film, the discharger disc plates 11having discharge portion slits 12 are arranged in a solid structure withsuitable spaces. The discharger disc plates are connected mutually andelectrically.

[0059] When the high frequency and high voltage power supply is appliedto between the discharger and the insulation electrode, the coronadischarge generates from the outer periphery of the discharger discplate 11 and an end face of the discharge slit 12. When NOx gas contactsto these discharge portions, the decomposition and the chemical reactiongenerate.

[0060] The condition of the discharge varies in accordance with astretching length of the discharge end face, the thickness of theinsulation materials of the insulation electrode and the voltage and thefrequency number of the high frequency and high voltage power supply tobe applied. When an arrangement pitch of the discharger disc plate 11 is10 mm and a stretching length of the discharge end face is 500 mm, agood data having the high discharge decomposition efficiency isattained.

[0061] By the arranging with the solid structure of the construction ofthe discharger disc plate, the leakage between the electrodes due to thedirty of the particle shape substance is lessened, and further to arisethe durability performance a thin insulation film is performed on a partor a whole of an inner portion of an inside portion of the disc plate.As a result the durability performance against to the dirty of theparticle shape substance, etc. can be heightened remarkably.

[0062]FIG. 3B shows an example in which, in a discharger disc plate ofthe discharge element, a slit b is formed on a part of this disc plateand the discharger disc plate 11 a is formed, further on an outerperiphery of an insulation electrode portion 13 a the discharger discplate 11 a is arranged with a spiral form.

[0063] Then the flow resistance of the exhaust gas is lessened and atthe same time the exhaust gas is contacted easily with the corona, whichis generated in an end portion of the discharger, and accordingly thereaction efficiency is improved. In this case, the discharger electrodes11 a are connected mutually and electrically.

[0064]FIG. 3C shows an example in which to improve the anti-pollutionperformance of the particle shape substance stated on FIG. 3A theinsulation plates 11 b are arranged to the discharger disc plate 11every one by one. A reference numeral 12 b denotes the slit 13, and areference numeral 13 b denotes the insulation electrode portion.

[0065] From FIG. 4A to FIG. 4C will be explained. FIG. 4A shows thebarrier discharge portion which is the same to the FIG. 3A. FIG. 4Bshows an example in which the insulation film is formed with alamination layer using a thin insulation film insulation bodies 14a and14b, which are processed on an insulation substance of the insulationelectrode portion 13C shown in FIG. 4A, by the anode oxidization filmetc. and the necessary electric insulation withstanding force is given.

[0066]FIG. 4C shows an example of the discharger disc plate 11 c inwhich, on a surface of the discharge disc plate 11 shown in FIG. 4A, togive the anti-environment performance against the heat, the oxidationand the arc, to the metal base material such as alumina and titanium theanode oxidation film is performed directly or on a surface of the ironor the chrome steel a thin film such as titanium is carried out thecladding and the surface thereof is carried out the oxidation processingand is finished. A reference numeral 12 c denotes a discharge slit,which is provided on the discharger disc plate 11.

[0067]FIG. 5A and FIG. 5B will be explained. FIG. 5A shows the barrierdischarger which is the same to one shown in FIG. 3A. FIG. 5B shows an sexample in which to promote the anti-environment performance theinsulation electrode portion 13 c and the insulation film 14 shown inFIG. 4B and the discharger disc plate 11 shown in FIG. 4C in which theinsulation covering film is performed are combined and moreanti-environment performance is promoted. A reference numeral 11 ddenotes a discharger disc plate and a reference numeral 14 b denotes aninsulation body having the thin insulation film, which is processed bythe anode oxidation film etc.

[0068]FIG. 6 shows one example of the characteristic of NOxdecomposition in the barrier processing unit against the alternatingcurrent application voltage. By the changes of the voltages, theconditions of the changes of NOx, NO and NO₂ will be understood.

[0069] NO reduces abruptly in company with the voltage arise and vanishcompletely in 6 kV and continues zero (0) until 7.5 kV and further whenthe voltage arises the concentration increases gradually. When NO iszero (0) condition, NOx presents only NO₂ condition and between from 6.5kV to 7.5 kV, it changes abruptly with V shape between from 130 ppm tozero (0). Accordingly, utilizing this characteristic, it attains thecomplete processing of the NO and shows the possibility about thedecomposition of the particle shape substance without the residual NOx.By suiting the combustion conditions of the engine and the boiler theharmful exhaust gas becomes completely to the harmless one in the realtime.

[0070] In the conventional apparatus and machine, it is impossible tocarry out the adjustment, even in some conditions the most suitablecharacteristic may obtain, but it is impossible to follow theconcentration change of the harmful substances in the exhaust gas incompany with the largely changed operation condition. Further, as to thecharacteristic inferior in the use condition no solvingcounter-measurement exists.

[0071] The above stated exhaust gas processing apparatus has thecomparative simple structure in comparison with that of the prior artapparatus and has the epoch-making gas processing technique which enableto make the harmless performance of the harmful exhaust gas by followingthe operation conditions of the engine etc. and utilizes all fieldsrelating to the decomposition of the gas and the reaction.

[0072] This apparatus utilizes effectively to the pollutioncounter-measurement of the automobiles, the boilers and the engines andthe chemical reaction promotion, the combustion promotion, and thedecomposition of the harmful substances. Further, the discharge portioncan manufactures from the advanced production techniques of the wire andthe optical fiber and accordingly the ozone generation apparatus havingthe high quality, the superior production performance, and the simplestructure and the low cost or the corona generating apparatus canprovide.

[0073] Further, by the provisions of the cyclone having the simplestructure and the interference chamber effective for the standardizationof the exhaust flow amount, the particle shape substance can be caughtstably, and to the response to the demand the particle shape substanceis processed completely using the bug filter and the electric dustcollection.

[0074] The effects according to the present invention has the excellenteffects as the exhaust gas post-processing apparatus such as theautomobiles and the boilers the performance, the cost performance andthe maintenance performance can be solved at a stroke. The main effectsare as following:

[0075] 1. With the simple discharge wire structure, NOx (NO and NO₂)decomposes completely, the generation amount of and NO₂ for oxidizing andecomposing the particle shape substances is controlled freely under thezero condition of NO and NO₂), and it follows completely to thedecomposition of the particle shape substances in the exhaust gas. Thecatalyst used in this case does not employ almost the noble metals andis oxidized under the low temperature of 300 C. and is exhausted withthe harmless carbon dioxide.

[0076] 2. The particle shape substances are adsorbed to the ceramicfilter and the portions necessary for the burning up of the adsorptionface are detected by the plural electrodes, with the power supply of thelow voltage the particle shape substances are burned up selectively andelectrically and are made as the carbon dioxide and are formed as theharmless substances. Accordingly, the apparatus and machine forprocessing the on-board real time and having superior maintenanceperformance realizes.

What is claimed is:
 1. An exhaust gas processing apparatus used in adiesel vehicle etc. characterized in that by arranging in a front stageof a processing system or arranging together, at least one centrifugalseparation machine such as a cyclone is provided, whereby a particleshape substance in an exhaust gas is caught.
 2. An exhaust gasprocessing apparatus according to claim 1, characterized in that to saidat least one centrifugal separation machine such as said cycloneprovided in said processing system, whereby an efficiency of said atleast one centrifugal separation machine such as said cyclone isimproved.
 3. An exhaust gas processing apparatus according to claim 1 orclaim 2, characterized in that to improve said at least one centrifugalseparation machine such as said cyclone, an air pressure generationapparatus is constituted in said processing system.
 4. An exhaust gasprocessing apparatus used in a diesel vehicle etc. characterized in thatby arranging in a front stage of a processing system or arrangingtogether, and using an anti-environment material, at least one of abrush, a heater, a burner and a high pressure injection nozzle isprovided.
 5. An exhaust gas processing apparatus used in a dieselvehicle etc. characterized in that to catch and decompose a particleshape substance in an exhaust gas and a substance containing NOx etc.,at least one interference box for mitigating and averaging a change of aflow in a front stage of a processing system is provided.
 6. An exhaustgas processing apparatus according to claim 1, characterized in that insaid processing system, said cyclone is combined with an electric dustcollection apparatus.
 7. An exhaust gas processing apparatus accordingto claim 5, characterized in that in said processing system, a cycloneis combined with an electric dust collection apparatus in the exhaustgas processing apparatus.